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The equipment achieves three-dimensional precision micro machining of various inclined surfaces, conical surfaces, and spherical surfaces through precise control of a multidimensional micro-displacement system.
Using ultra-short pulse laser technology minimizes surface heat effects and residual debris for superior quality.
Enables precise micro-nano machining of complex geometries in 3D space, including conical and spherical surfaces.
Ideal for aerospace, automotive, microelectronics, semiconductor, and biomedical fields.
| Parameter | Specification (LMS10) |
|---|---|
| Laser Type | Ultrafast Pulsed Laser |
| Wavelength | 1064nm, 532nm, 355nm (Integrated Systems) |
| X/Y/Z Positioning Accuracy | ±2μm / ±2μm / ±4μm |
| X/Y/Z Repeatability | ±1.5μm / ±1.5μm / ±3μm |
| A/B Angle Accuracy | 0.003° / 0.003° |
| Drilling Aspect Ratio | Helical 1:20, Five-Axis 1:10 |





